Our group has labs on the second floor and basement
level of the Chemistry building, which is located on the south side
of the CSU campus. We study plasma processing and chemical vapor deposition
using the following techniques:
- optical emission spectroscopy (OES)
- mass spectrometry (MS)
- laser-induced fluorescence (LIF)
- Fourier transform infrared spectroscopy (FTIR)
- contact angle goniometry
- profilometry
- atomic force microscopy
(AFM)
- scanning electron microscopy (SEM)
- x-ray photoelectron spectroscopy
(XPS)
- Auger electron spectroscopy (AES)
- spectroscopic ellipsometry (SE)
The
sections listed below should help to give you an idea of
how our labs are set
up and
what
kinds
of experiments
we are
able to do.
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